Semiconductor and display-related productsFlexible Planar Heater iCas MHE

This product is part of the "iCas" brand, which provides solutions for controlling heat, electricity, and electromagnetic waves.

Highly Energy-Efficient Heating with Flexible Planar Heater

TOMOEGAWA's flexible planar heater utilizes stainless fiber sheet, which is our unique technologies.
The excellent flexibility of stainless-steel fiber conforms closely to the heated surface and heats efficiently, thereby contributing to energy savings.
It is also UL499 certified. (Registration number: E541733)

Feature 1Efficient Heat Transfer to Targeted Areas

TOMOEGAWA's flexible flat heater conforms well to the surface of the object to be heated due to its excellent flexibility of stainless steel fiber sheets.
With this characteristic, heat can be efficiently transferred, and depending on the conditions, energy savings of about 50%* can be expected compared to the nichrome wire heater.

* Confirmed by in-house measurement.

ETV-Verified Technology

Flexible Planar Heater iCas MHE contributes to energy savings through efficient heat transfer achieved by close contact with the heated object.
Its energy-saving performance has been verified by a third-party organization under Japan's Environmental Technology Verification (ETV) Program.

Feature 2Uniform Heating across the Surface

Utilizing thin and flat stainless steel fiber sheets, these heaters provide even heating across all surfaces in uniform manner, as shown in our thermographic images. And also the interconnected fibers minimize the risk of breakage and ensure consistent heat distribution.

Nichrome Wire Heater + Heat Diffusion Layer (Aluminum Foil)

Flexible Planar Heater + Heat Diffusion Layer (Aluminum Foil)

Uneven heating which often occurs in Nichrome wire heaters due to their surface irregularities, even when a heat diffusion layer (such as aluminum foil) is used as shown in our thermographic images.

Feature 3Reduced Heating Time

The stainless fiber sheet, which is a heating element, is features by its low heat capacity compared to stainless steel foil.
Therefore, compared to planar heater made of stainless steel foil, it is possible to reach the target temperature in a shorter time.*

* Confirmed by in-house measurement.

Feature 4Customization to Meet Client Specifications

TOMOEGAWA's Flexible Planar Heater are designed and customized optimally to meet client's requirements, such as adjusting the resistance value by changing the heating-element width and adjusting the partial heating temperature.
They are also suitable for complex shapes, including L-shaped pipes, elbows, and pipe fittings.
Please share your requirements with us.

Application Examples

Heating of factory piping, equipment piping
Heating of curved surfaces and narrow spaces in various equipment

Application Example: Small-Diameter Pipe Heater

Achieves space-saving temperature control for gas piping with diameters as small as 1/4 in. (Ø6.35 mm).

Suitable for small-diameter piping from Ø6.35 to 12 mm.

This is a heating solution for small-diameter gas piping based on Flexible Planar Heater technology.
It is ideal for thermal insulation and heating of small-diameter piping used in semiconductor manufacturing equipment, analytical instruments, and other related applications.

Application Example: Thin-Layer Heater for Flat Enclosures

Reduces temperature variations and provides uniform heating of components with different heat capacities using a single heater.

Minimum thickness: 3 mm
Suitable for installation in limited spaces
High pattern-design flexibility allows heat output to be tailored for each area of the heater surface

Available in both integrated heater-and-insulation and stand-alone film heater configurations to meet installation space and application needs.

This thin-layer heater was developed using Flexible Planar Heater technology for flat surfaces of chambers, pumps, gas boxes, and other components used in semiconductor manufacturing equipment.
By controlling the heat distribution within a single heater, it can provide uniform heating across areas with different heat capacities.
It is also available as a stand-alone film heater.