Feature 2Functional Advantages Enabled by a Porous Structure

The heating element uses Stainless Fiber Sheet developed by our company. This sheet is manufactured using papermaking technology and has paper-like porous structure.
Therefore, as shown in the following usage illustration, it is possible to heat the air while allowing the air to pass through the heating element itself.
It enables both heating and airflow, which is difficult to achieve with conventional heaters.

Feature 3Enables precise temperature control and fast thermal response

Since the heater itself is air-permeable, it can effectively heat the air while allowing air to pass through it perpendicularly to the heating surface.
This structure minimizes the heat capacity of the heating component, enabling excellent temperature responsiveness, rapid heat-up performance, and precise temperature control.

Feature 4The heater component can be made smaller and lighter

Since the heating element is porous and lightweight like paper, it allows for the miniaturization and weight reduction of the heater component, creating additional space inside equipment.
As a result, the created space can be used to add the necessary functions tailored to the needs of the customer's site.

Feature 5Customization is possible to meet customer specifications

TOMOEGAWA's Air-Permeable Heater Component can be designed and customized according to the customer specifications.

• Adjustment of resistance by modifying the width of the heating element
• Zone-based temperature adjustment
• Heater shape
• Heating pattern
• Heating area
• Size etc.

We design and customize the specifications to suit the application.
Please let us know your requirements.

Applications

It is suitable for the following applications, which require high-precision temperature control and high-speed temperature responsiveness.

• Semiconductor lithography equipment
• Semiconductor inspection equipment
• Semiconductor back-end equipment
• Display manufacturing equipment
• Battery manufacturing equipment
• Precision analysis equipment
• Optical measurement equipment
• Medical analysis equipment
• Research and development equipment
• Other manufacturing equipment requiring high-precision temperature control

Frequently Asked Questions (FAQ)

Q. How does it differ from conventional heaters?

Conventional heaters may have a structure where the heating element obstructs the airflow. Since the heating element of iCas MCT has a porous structure, it can heat while allowing air to pass through it.
This contributes to improved temperature responsiveness, enhanced energy efficiency, and miniaturization of equipment.

Q. What level of temperature control performance can be expected?

iCas MCT achieves high-speed heating and excellent temperature responsiveness due to its low-heat-capacity structure.
While it depends on the application, it has been used in high-precision temperature control applications such as semiconductor lithography equipment.

Q. Why is air permeability important?

In conventional heaters, the heating element itself may obstruct the airflow.
Since the heating element of iCas MCT itself is air-permeable, it can heat efficiently while ensuring airflow.
As a result, it contributes to reducing temperature non-uniformity, shortening response time, and greater design flexibility of equipment.

Q. Why is temperature responsiveness important?

The higher the temperature responsiveness, the more efficiently energy can be used.
As a result, the time required to reach the set temperature and the time needed for temperature correction can be reduced, thereby improving the performance of the equipment.
Furthermore, it can meet modern needs that require efficient energy use.

Q. How is the product delivered?

iCas MCT is a custom-made product designed and manufactured according to the customer's required specifications.
You can also consult us regarding specifications such as shape, size, and heating patterns.

Q. Are there any restrictions on the heater size?

iCas MCT can be custom-designed to meet customer specifications.
The available sizes and shapes vary depending on the operating conditions, so please first consult us regarding your desired dimensions and application.

Q. What is the operating temperature range?

The usable temperature range varies depending on the heater configuration, the surrounding components, and the operating environment.
Since we design according to customer specifications, please inform us of the target temperature and operating conditions.

Q. Are there any restrictions on the air volume and wind speed?

iCas MCT features a structure that allows air to pass through the heating element itself, enabling heating while allowing air to flow through.
The optimal air volume and wind speed conditions vary depending on the required heating performance and equipment configuration.
We will evaluate and design according to the application, so please inform us of the conditions.

Q. Does it also save energy?

iCas MCT achieves high temperature responsiveness and heating performance while minimizing heat capacity.
Therefore, it can efficiently heat the necessary areas, contributing to reduced time to reach the target temperature and improved energy efficiency.
The actual energy-saving effect varies depending on the equipment configuration and operating conditions.

Q. Can it be used for applications other than semiconductor lithography equipment?

iCas MCT is developed for equipment that requires precise temperature control and high-speed temperature response.
Application examples include:

• semiconductor manufacturing equipment
• Semiconductor inspection equipment
• Display manufacturing equipment
• Optical equipment
• Analytical equipment
• Medical equipment
• Research and development equipment